pH electrode based on ALD deposited iridium oxide
نویسندگان
چکیده
منابع مشابه
A pH Electrode Based on Melt-Oxidized Iridium Oxide
Fabrication and characterization of a novel potentiometric pH electrode based on melt-oxidized iridium oxide film is presented. The oxide film produced in a lithium carbonate melt has the composition of LixIrOy•nH2O, and shows high chemical stability. The electrode based on this oxide film exhibits very promising pH sensing performance, with an ideal Nernstian response in the tested pH range of...
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An implantable micromachined multi-electrode array (MEA) microprobe modified for utilization as a complete electrochemical biosensor for rapid glutamate detection is described. A post-fabrication method for electrochemical deposition of an iridium oxide (IrOx) film onto a designated microelectrode enabled incorporation of an IrOx reference electrode (RE) on the microprobe. The on-probe IrOx RE ...
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Thermal ALD deposited Al2O3 films on silicon show marked difference in surface passivation quality as a function of annealing time (using rapid thermal process). An effective and quality passivation is realized in short anneal duration (~100s) which is reflected in the low surface recombination velocity (SRV <10 cm/s). The deduced values are close to the best reported SRV obtained by high therm...
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The properties of iridium oxide pH sensors produced by electrochemically induced deposition on gold electrodes were examined as a function of the composition of the deposition solution, as well as the electrochemical deposition protocol. The composition of the Ir IV deposition solutions, which included oxalate or ethylene diamine tetraacetic acid complexing agent or no complexing agent, had no ...
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Very smooth thin films of iridium have been deposited on super polished fused silica (SiO2) substrates using dc magnetron sputtering in argon plasma. The influence of deposition process parameters on film micro roughness has been investigated. In addition, film optical constants have been determined using variable angle spectroscopic ellipsometery, over the spectra range from vacuum ultraviolet...
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ژورنال
عنوان ژورنال: Procedia Engineering
سال: 2010
ISSN: 1877-7058
DOI: 10.1016/j.proeng.2010.09.168